Diborane11
乙硼11烷，又稱六氫化二硼、硼乙烷，分子式為B2H6，相對分子量為27.67。乙硼烷在正常條件下（15℃，101.325kPa）是一種無色、易燃、易分解、具有令人惡心的煙火氣味和微甜味道的高毒氣體。乙硼烷是一種非常活潑的化合物，常溫下就不很穩定，會緩慢地分解生成各種不同含量的硼氫化合物，同時會放出氫氣。乙硼烷遇水立即水解，最終得到硼酸和大量的氫氣。乙硼11烷在電子工業中作為氣態雜質源、離子注入和硼摻雜氧化擴散的摻雜劑使用。
Diborane has a molecular formula of B2H6 and a relative molecular weight of 27.67. Diborane is a kind of colorless, flammable, labile and high toxic gas with disgusting fireworks smell and sweet taste at normal conditions (15℃, 101.325kPa). Diborane is a very reactive compound that is unstable at room temperature and decomposes slowly to form a variety of borohydrides in different contents, hydrogen is generated at same time. Diborane hydrolyzes immediately encountering with water, generating boric acid and a large amount of hydrogen. Diborane11 is used as dopant for gaseous impurity source, ion implantation and boron doped oxide diffusion in the electronic industry.
| 項目Items | 單位Units | 指標Index |
| 乙硼11烷，Diborane11≥ | Vol.% | 99.99 |
| CH4+C2H6，≤ | ppm | 80 |
| 氮氣，Nitrogen≤ | ppm | 10 |
乙硼11烷可在微電子、平板顯示、太陽能電池、LED、光纖、醫藥、核電等領域應用，也可用作聚合催化劑。乙硼11烷在半導體制造中用作硅材料的p型摻雜源，用于半導體生產，硅和鍺的外延生長、鈍化、擴散和離子注入。
Diborane can be used in microelectronics, flat panel display, solar cells, LED, optical fiber, medicine, nuclear power and other fields, also can be used as polymerization catalyst. Diborane11 is a p-doped source of silicon used in semiconductor manufacturing, epitaxial growth, passivation, diffusion, and ion implantation of silicon and germanium.
乙硼11烷存放于不銹鋼鋼瓶中，在室溫條件下，鋼瓶內純乙硼11烷每月要分解10%~20%，在低溫下乙硼11烷可以貯存幾個月且分解速度低得多，但乙硼11烷儲存溫度不應低于-80℃。儲存區應遠離明火、火花、熱源，并應備有泄漏應急處理設備。
Diborane11 is stored in stainless steel cylinders, pure diborane11 in the cylinder decomposes 10%~20% a month at room temperature, diborane11 can be stored a few months and the decomposition rate is much lower in low temperature, but storage temperature of diborane11 should not be lower than -80℃. Storage area shall be away from open flame, spark and heat source, and shall be equipped with equipment for emergency.
