Carbonyl Fluoride
碳酰氟（CF2O），又名氟光氣、氟化羰、羰基氟、氟氧化碳、氧氟化碳等，分子量為66.01，熔點為-114℃，沸點為-84℃。碳酰氟是一種高毒刺激性氣體，對皮膚及呼吸道粘膜具有強烈的刺激作用，能溶于水和乙醇，在水中分解放出劇毒的腐蝕性氣體，具有強烈的腐蝕性。作為新一代電子工業中的刻蝕氣體和清洗氣體，其溫室效應極低，具有極低的全球變暖潛能值和極低的大氣壽命（< 1年），綠色環保。
Molecular weight of carbonyl fluoride(CF2O) is 66.01 and its melting point is -114 ℃, boiling point is -84 ℃. Carbonyl fluoride is a kind of highly toxic and irritating gas with highly corrosive which has a strong stimulating effect on skin and respiratory tract mucosa, it can dissolve in water and ethanol, decompose in water and release highly toxic corrosive gas. As the etching gas and cleaning gas in the new generation of electronic industry, carbonyl fluoride has very low greenhouse effect, it is environmental friendly with very low global warming potential and very low atmospheric life (< 1 year).
| Items | 單位Units | 指標Index |
| Carbonyl fluoride2O）≥ | Vol.% | 99 |
| 氧氣、氬氣Oxygen, Argon（O2+Ar）≤ | Vol.ppm | 100 |
| 氮氣Nitrogen（N2）≤ | Vol.ppm | 1000 |
| 四氟化碳Carbon tetrafluoride（CF4）≤ | Vol.ppm | 150 |
| 二氧化碳Carbon dioxide（CO2）≤ | Vol.ppm | 2500 |
碳酰氟在電子工業中用作清洗氣和刻蝕氣，其溫室效應極低，綠色環保。碳酰氟也可作為有機合成、無機合成中的重要的氟化劑、氟原料。碳酰氟還是有機合成中的重要中間體，用于生產氟塑料或其他下游產品。碳酰氟還可以純化和干燥化合物（尤其是含氟化合物）。
Carbonyl fluoride is used as cleaning gas and etching gas in electronic industry, it is environmental friendly with very low greenhouse effect. Carbonyl fluoride can also be used as an important fluridizer and fluorous raw material in organic synthesis and inorganic synthesis. Carbonyl fluoride is also an important intermediate in organic synthesis, it is used to produce fluorine plastics or other down-stream product. Carbonyl fluoride can also purify and dry compounds (especially fluorochemicals).
碳酰氟充裝在鋼質無縫鋼瓶中，鋼瓶容積為10 L、40 L，具體包裝規格可根據用戶需求定制更改。產品儲存于陰涼、干燥、通風良好的庫房，遠離火種、熱源。防止受潮、雨淋、陽光直射。
Carbonyl fluoride is stored in standard seamless cylinders, the packing specifications include 10 L and 40 L. Specific packaging specifications can be customized according to user requirements. The product is stored in a shady, dry and ventilated storeroom away from fire and heat source. Protecting against moisture, rain and direct sunlight.
