Carbon Tetrafluoride
四氟化碳（CF4），又稱四氟甲烷，相對分子量為88，熔點為-183.6℃，沸點為-127.8℃，是一種無色無味的不可燃?xì)怏w。常溫下，四氟化碳屬于易壓縮性氣體，揮發(fā)性較高，是最穩(wěn)定的有機化合物之一，不易溶于水。四氟化碳與可燃性氣體燃燒時，會分解產(chǎn)生有毒氟化物。四氟化碳在微電子工業(yè)等領(lǐng)域具有重要的應(yīng)用，作為蝕刻二氧化硅和氮化硅的介質(zhì)材料已成熟運用多年，也是目前微電子工業(yè)中用量最大的等離子蝕刻氣體。
Carbon tetrafluoride (CF4) is a colorless, odorless flammable with relative molecular mass of 88, melting point of 183.6℃, boiling point of 127.8℃. At room temperature, CF4 is a compressible gas with high volatility, it is one of the most stable organic compounds and does not dissolve in water. When carbon tetrafluoride burns with combustible gas, it will decompose to generate toxic fluoride. Carbon tetrafluoride has important application in microelectronics industry. Carbon tetrafluoride has been used as a dielectric material for etching silicon dioxide and silicon nitride for many years, it is also the largest dosage of plasma etching gas in the microelectronics industry at present.
| Items | 單位Units | 指標(biāo)Index |
| Carbon tetrafluoride4）≥ | Vol.% | 99.999 |
| 二氧化碳Carbon dioxide（CO2）≤ | Vol.ppm | 1 |
| 一氧化碳Carbon monoxide（CO）≤ | Vol.ppm | 1 |
| 氮氣Nitrogen（N2）≤ | Vol.ppm | 4 |
| 其他鹵代烴Other halogenated hydrocarbons（CF3Cl,CF2Cl2,CF3H）≤ | Vol.ppm | 1 |
| 氧氣Oxygen（O2）≤ | Vol.ppm | 1 |
| 六氟化硫Sulfur hexafluoride（SF6）≤ | Vol.ppm | 1 |
| 酸度（HF）Acidity | Vol.ppm | 0.1 |
| 水Water（H2O）≤ | Vol.ppm | 1 |
四氟化碳是目前微電子工業(yè)中用量最大的等離子蝕刻氣體，與高純氮氣的混合體可廣泛應(yīng)用于硅、二氧化硅、氮化硅、磷硅玻璃及鎢薄膜材料的蝕刻。此外，四氟化碳在低溫下可作為低溫流體應(yīng)用，在制冷、氣體絕緣、氟化劑、表面處理劑和激光氣體泄漏檢驗劑領(lǐng)域中有一定的應(yīng)用空間。
Carbon tetrafluoride is the largest dosage of plasma etching gas in the microelectronics industry at present. The mixture of carbon tetrafluoride and high purity nitrogen can be widely used in etch of silicon, silicon dioxide, silicon nitride, phosphoro-silicate glass and thin film materials of tungsten. At the same time, carbon tetrafluoride can be used as cryogenic fluid at low temperature, and it also can be applicated in the fields of refrigeration, gas insulation, fluridizer, surface treating agent and inspection agent of laser gas leakage.
四氟化碳充裝在鋼質(zhì)無縫氣瓶中，鋼瓶容積分別為8 L、44 L、47 L，具體包裝規(guī)格可根據(jù)用戶需求定制更改。四氟化碳儲存于陰涼、通風(fēng)的不燃?xì)怏w專用庫房中，遠(yuǎn)離火種、熱源，庫溫不宜超過30℃。應(yīng)與易（可）燃物、氧化劑分開存放，切忌混儲。存應(yīng)備有泄漏應(yīng)急處理設(shè)備。
Carbon tetrafluoride is stored in standard seamless cylinders, the packing specifications include 8L, 44L and 47L respectively. Specific packaging specifications can be customized according to user requirements. Carbon tetrafluoride is stored in a shady and ventilated storeroom away from fire and heat source, temperature of storeroom does not exceed 30℃. It should be separately stored with inflammable (combustible) and oxidizing agent. The storage area should be equipped with emergency equipment for emergency.
