Boron11 Trichloride
常溫常壓下三氯化硼11（B11Cl3）為無色發(fā)煙氣體，可燃，有刺激性、酸性氣味，遇水分解生成氯化氫和硼酸，并放出大量熱量，在濕空氣中因水解而生成煙霧，在醇中分解為鹽酸和硼酸酯。三氯化硼11反應(yīng)能力較強(qiáng)，能形成多種配位化合物，三氯化硼加熱能和玻璃、陶瓷起反應(yīng)，也能和許多有機(jī)物反應(yīng)形成各種有機(jī)硼化合物。高純?nèi)然?1主要用于（硅）半導(dǎo)體器件制造工藝中的擴(kuò)散摻雜，在高溫下，經(jīng)過分解生成硼雜質(zhì)向硅中擴(kuò)散，形成P型半導(dǎo)體，也可用于Al、MoSi2、TaSi2、TiSi2、WSi等材料的干法蝕刻。
At normal temperature and pressure, boron trichloride(BCl3) is colorless smoke gas, which is flammable, pungent, acidic odor. Boron trichloride decomposes into hydrochloric acid and boric acid and releases a lot of heat encountering with water, it generates smoke in wet air because of hydrolysis, and BCl3decomposes into hydrochloric acid and boric acid ester in alcohol. Boron trichloride has a strong reaction ability and can form a variety of coordination compounds. Boron trichloride can react with glass and ceramic when heated, and it also reacts with many organic compounds to form a variety of organoboron compounds. High purity boron11 trichloride is mainly used for diffusion doping in the manufacturing process of (silicon) semiconductor devices. Boron impurities are generated through decomposition of BCl3and diffuse toward silicon to form p-type semiconductor at high temperature. BCl3 can also be used for dry etching of Al, MoSi2, TaSi2, TiSi2, WSi and other materials.
| 項(xiàng)目Items | 單位Units | 指標(biāo)Index |
| 三氯化硼11 Boron11 Trichloride≥ | Vol.% | 99.9995 |
| 氧+氬Oxygen+Argon< | Vol.ppm | 1 |
| 氮Nitrogen< | Vol.ppm | 4 |
| 一氧化碳Carbon monoxide< | Vol.ppm | 0.5 |
| 二氧化碳Carbon dioxide< | Vol.ppm | 0.2 |
| 甲烷Methane < | Vol.ppm | 0.5 |
| 總雜質(zhì)含量 Total impurity content≤ | Vol.ppm | 5 |
| 金屬離子Metal ion | Vol.ppm | 供需雙方商定 Supply and demand agreement |
高純?nèi)然?1主要用于半導(dǎo)體器件和集成電路制造中擴(kuò)散摻雜、離子注入、干法蝕刻等工藝。三氯化硼11也可用以制造高純硼、有機(jī)合成用催化劑、硅酸鹽分解時(shí)的助熔劑，在合金精制中作為除氧劑、氮化物和碳化物的添加劑。
High pure boron11 trichloride is mainly used in diffusion doping, ion implantation, dry etching and other processes in semiconductor devices and integrated circuit manufacture. Boron trichloride can be used to manufacture high pure boron, catalyst for organic synthesis, fluxing agent for silicate decomposition, and it also used as additive of deoxidizer, nitrides and carbides in alloy refining.
三氯化硼11充裝于鋼瓶中，包裝規(guī)格為10L和47L，具體包裝規(guī)格可根據(jù)用戶要求定制更改。產(chǎn)品儲存于陰涼、干燥、通風(fēng)庫房內(nèi)，庫房溫度低于60℃。嚴(yán)禁暴曬，遠(yuǎn)離熱源。包裝必須密封，與堿類等危險(xiǎn)品分開儲存。
Boron11 trichloride is filled in the cylinder. The packaging specifications include 10L and 47L.The product is stored in a shady, dry and ventilated storeroom below 60℃. It is forbidden to expose to the sun and keeps away from heat sources. The package must be sealed and it should be separately stored with alkali and other hazardous articles.
