Perfluorobutadiene
全氟丁二烯(C4F6)是一種無色無味且不溶于水的氣體。全氟丁二烯熔點為-132.0℃，沸點為5.9℃。全氟丁二烯是一種含有六個氟原子和兩個碳碳雙鍵的共軛烯烴，作為一種優(yōu)異的蝕刻氣體，由于其獨特的F/C比，與傳統(tǒng)使用的全氟飽和氟碳類蝕刻氣體相比，全氟丁二烯具有更高的蝕刻選擇性、精確性和縱橫比，可以蝕刻小于100nm 甚至更窄的電子線路。此外，C4F6比c-C4F8具有更高的對光阻和氮化硅選擇比，在使用時可以提高蝕刻的穩(wěn)定性，提高蝕刻速率和均勻度，從而提高產(chǎn)品優(yōu)良率。
Perfluorobutadiene (C4F6) is a kind of colorless, odorless, and water insoluble gas. Its melting point is 132.0 ℃, boiling point is 5.9 ℃. Perfluorobutadiene is a kind of conjugated olefins which contains six fluorine atoms and two carbon-carbon double bond, as a kind of excellent etching gas, because of its unique F/C ratio, perfluorobutadiene has higher etching selectivity, accuracy and aspect ratio than those of traditional perfluorinated saturated fluorocarbon etching gas, perfluorobutadiene can etch less than 100 nm even narrower electronic circuit. In addition, C4F6 has a higher selective ratio of photoresist and silicon nitride than that of c-C4F8, which can improve the etching stability, etching rate and uniformity, and thus improve the product quality.
| 項目 Items | 單位 Unit | 指標(biāo) Index |
| C4F6 | Vol.% | ≥99.99 |
| N2 | Vol.ppm | ≤10 |
| O2+Ar | Vol.ppm | ≤2 |
| H2O | Vol.ppm | ≤3 |
| CO2 | Vol.ppm | ≤10 |
| CO | Vol.ppm | ≤3 |
| 異丙醇 Isopropanol | Vol.ppm | ≤5 |
| 其他氟碳化合物 Other fluorocarbon | Vol.ppm | ≤70 |
| 活性氟化物（Measured by HF） | Wt.ppm | ≤2 |
作為刻蝕氣用于半導(dǎo)體產(chǎn)品的等離子介質(zhì)刻蝕。
Used as etching gas for plasma etching of semiconductor products.
全氟丁二烯充裝在鋼瓶中，鋼瓶型號為B10，尺寸14cm×83cm，內(nèi)部容積10.1L，毛重14.7kg，有效載荷10kg。具體包裝規(guī)格可根據(jù)用戶要求定制更改。
Perfluorobutadiene is filled in steel cylinders with the model of B10, size of 14cm×83cm, internal volume of 10.1L, gross weight of 14.7kg, payload of 10kg. Packaging specifications can be customized according to customers' requirements.
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