五氟化鉭_半導體材料_產(chǎn)品中心_山東重山光電材料股份有限公司

五氟化鉭

Tantalum Pentafluoride

產(chǎn)品介紹 Product introduction

五氟化鉭（TaF₅），相對分子量為276，熔點為96.8℃，沸點為229.5℃，是一種白色結(jié)晶，折光能力強。五氟化鉭微溶于熱的二硫化碳和四氯化碳溶液中，溶于水和乙醚、氫氟酸、硝酸、發(fā)煙硝酸，在空氣中吸濕而不水解。高純五氟化鉭在微電子工業(yè)中用作化學氣相淀積硅化鉭或鉭膜，制作低電阻、高熔點的電路互連線和柵極。五氟化鉭在電子元器件表面、半導體器件表面、鈦及金屬氮化物電極表面、金屬鎢表面上，可形成附著力極強、厚度為0.1μm級的絕緣薄膜，具有高的介電率。

Tantalum pentafluoride (TaF₅) is a white crystal with strong refractive ability at room temperature, its relative molecular mass is 276, melting point is 96.8℃, boiling point is 229.5℃. Tantalum pentafluoride is slightly soluble in hot solution of carbon disulfide and carbon tetrachloride, it is soluble in water and ether, hydrofluoric acid, nitric acid, it is hygroscopic in air without hydrolysis. High pure tantalum pentafluoride is used in the microelectronics industry for chemical vapor deposition of tantalum silicide or tantalum film, in order to produce interconnects and grid electrode with low resistance and high melting point. Tantalum pentafluoride can form insulation film with strong adhesion, thickness of 0.1 μm, and a high dielectric constant on the surface of the electronic components, semiconductor devices, titanium, metallic nitride electrode and metal tungsten.

產(chǎn)品指標 Quality specification

項目Items	單位Units	指標Index
五氟化鉭Tantalum pentafluoride≥	Vol.%	99.9
四氟化碳Carbon tetrafluoride（CF₄）≤	Vol.ppm	10
氮氣Nitrogen（N₂）≤	Vol.ppm	50
（氧+氬）Oxygen+Argon（O₂+Ar）≤	Vol.ppm	50
六氟化硫Sulfur hexafluoride（SF₆）≤	Vol.ppm	10
四氟化硅Silicon tetrafluoride（SiF₄）≤	Vol.ppm	10
氟化氫Hydrogen fluoride（HF）≤	Vol.ppm	800

產(chǎn)品用途 Application

五氟化鉭在電子工業(yè)中用作化學氣相淀積硅化鉭或鉭膜，制作低電阻、高熔點的電路互連線和柵極。

Tantalum pentafluoride is used in the microelectronics industry for chemical vapor deposition of tantalum silicide or tantalum film, in order to produce interconnects and grid electrode with low resistance and high melting point.

包裝、貯存 Packaging and storage

五氟化鉭儲存于4.64L、10.2L、44L鋼瓶中，具體包裝規(guī)格可根據(jù)用戶需求定制更改。五氟化鉭貯存于陰涼、干燥的庫房中，確保有良好的通風。

Tantalum pentafluoride is stored in steel cylinders with packing specifications of 4.64L/10.2L/44L, the specific packaging specifications can be customized according to user requirements. Tantalum pentafluoride is stored in a shady and dry storeroom.